It was decided to put the groove for air flow in the backing strip so as to make the silicon wafer less prone to cracking during ... 5 Process Flow for Silicone Balloon Actuators The first devices made used MRTV-1 silicone rubber diluted with. 167.
|Title||:||11th Annual International Workshop on Micro Electro Mechanical Systems|
|Author||:||Institute of Electrical and Electronics Engineers, Baden-Wurttemberg (German). Ministry of Economic Affairs|