The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.... Imagawa, Y. Honda, M. Futamoto and H. Daimon, Jpn. J. Appl. Phys., 27: 1240( 1988)  C. Zaccherini, M. Bacchetta, G. Pavia, L. Riva, C. Savoia, to be published on MRS proceeding ... Schematic diagram of long throw sputtering chamber.
|Title||:||Advanced Metallization and Interconnect Systems for ULSI Applications in 1996:|
|Author||:||University of California, Berkeley. Continuing Education in Engineering|