1-5 October 1990, Santa Clara, California James Bondur, Terry R. Turner, Society of Photo-optical Instrumentation Engineers. surface. ... 2 shows an OEI schematic for normal, tp a 0Ad, and grazing angle observation, ip a 75Ad . In both cases a single ... The spacing of either the maxima or minima in the OEI signal depends on wavelength, index of refraction, angle of incidence, and polarization. For a givenanbsp;...
|Title||:||Advanced techniques for integrated circuit processing|
|Author||:||James Bondur, Terry R. Turner, Society of Photo-optical Instrumentation Engineers|
|Publisher||:||Society of Photo Optical - 1991|