Chemical Sensors 7 -and- MEMS/NEMS 7

Chemical Sensors 7 -and- MEMS/NEMS 7

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The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.The polysilicon wafer was etched in a LAM 490 at 200 watts at 400 mT with 80 sccm of Cl2 and 120 sccm of He. ... a thin layer of iron on a set of posts and a thin layer of copper on the opposing posts as schematically shown in figure 2.c.

Title:Chemical Sensors 7 -and- MEMS/NEMS 7
Author:Peter J. Hesketh
Publisher:The Electrochemical Society - 2006-01-01


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