Enabling Technologies for MEMS and Nanodevices

Enabling Technologies for MEMS and Nanodevices

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This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro a Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.Prior to the mid-1980s, medical pressure sensors typically cost about $80a€”100 and were re-used. ... mid-1980s, tire manufacturers developed a run-flat tire, which eliminated the need for a spare tire (reducing car costs and saving trunk space). ... Several systems were developed, but the run-flat tire did not prove popular and the market for tire-pressure monitoring did not develop over the next 15 years.

Title:Enabling Technologies for MEMS and Nanodevices
Author:Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
Publisher:John Wiley & Sons - 2013-03-27


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