... defects smaller than the detection limit of TEM (transmission electron microscopy) are present in the annealed region. ... the problems associated with the simultaneous laser irradiation of different device areas composed of polysilicon, Si02, anbsp;...
|Title||:||Excimer lasers, 1983 (OSA, Lake Tahoe, Nevada)|
|Author||:||Charles K. Rhodes, Optical Society of America|
|Publisher||:||Amer Inst of Physics - 1983|