In the future we are going to continue to micro-fabricate thinner oscillators to reduce the spring constants, and improve the quality factors by designing more suitable geometric shapes and by pursuing annealing studies. Thus, we might be able to achieve single nuclear spin measurements using NMRFM.3.6) shows some furnaces for deposition (e.g. 43NSi, 2SiO deposition) and annealing process in MRC cleanroom located ... one question you have to figure out is that how long this silicon dioxide deposit for SOI wafers should take, or in otheranbsp;...
|Title||:||Fabrication and Characterization of a Double Torsional Mechanical Oscillator and Its Applications in Gold Micromass Measurements|
|Publisher||:||ProQuest - 2008|