Gives an introduction to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, transducer applications, and sources of noise and nonlinearity in such devices. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed. The text concludes with an overview of future technologies.... the voltage of the plasma, and the negative electrode approaches a Vrf a Vp Al a 2Vrf with respect to the plasma . ... this design involves placing a capacitor between one of the electrodes and the source, creating a asymmetric voltage ... 10.9 we show a schematic diagram for a capacitively-coupled plasma system.
|Title||:||Foundations of Nanomechanics|
|Author||:||Andrew N. Cleland|
|Publisher||:||Springer Science & Business Media - 2002-10-18|