Handbook of Optical Metrology

Handbook of Optical Metrology

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Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains MoirAc metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chaptersa€”nearly 100 pagesa€”on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.32.1 INTRODUCTION: BACKGROUND OF EXPANSION OF METROLOGY APPLICATIONS BY VIDEO MEASURING ... For details of GRaamp;R, refer to Measurement Systems Analysis, Reference Manual, Third Edition, AIAG: ISO/ TS16949, 2002anbsp;...

Title:Handbook of Optical Metrology
Author:Toru Yoshizawa
Publisher:CRC Press - 2015-04-09


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