Multi electrode circular PSD and its application for angular measurement Hajime Nakajima, Masahiro Shikai. ... This device, constructed on Si substrate, has a photosensitive region, a resistor line and 16 output electrodes. ... This device can change its measuring range by selecting the pair of electrodes, making it not only capable of measuring any absolute angular position, but allows also a moreanbsp;...
|Title||:||Industrial optical sensors for metrology and inspection|
|Author||:||Kevin G. Harding, H. Philip Stahl, Society of Photo-optical Instrumentation Engineers|