JJAP Letters

JJAP Letters

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2007) Transmission electron microscope (TEM) with electron energy loss spectroscopy (EELS) is an indispensable ... however it has an energy resolution problem, because of the electrical and mechanical instability of the hardware. ... | j4) Ni silicide can suppress the leakage current at shallow pn-junction due to less Si consumption compared with cobalt silicides used in the former generation devices, anbsp;...

Title:JJAP Letters
Publisher: - 2007


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