This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules. Ziegler, F. SRIM instruction manual. http://www.srim.org (2003).  Moeller, W., andM. ...  Hobler, G. Monte Carlo simulation of two-dimensional implanted dopant distributions at mask edges. Nucl. ... B 24 (2006): 836a844.  Xu, X., D.
|Title||:||Nanofabrication Using Focused Ion and Electron Beams|
|Author||:||Ivo Utke, Stanislav Moshkalev, Phillip Russell|
|Publisher||:||OUP USA - 2012-05-01|