Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing

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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine qruns, q thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.... R2R control system, and delivery of a customized user manual for the R2R control system that covered controller operation as ... TABLE 13.13 Performance Improvement with R2R Control: Y and Z1 212 Run-to-Run Control in Semiconductoranbsp;...

Title:Run-to-Run Control in Semiconductor Manufacturing
Author:James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Publisher:CRC Press - 2000-11-30


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