This is the first book to comprehensively record the authorsa authoritative knowledge and practical experience of IC manufacturing, including the tremendous developments of recent years. With its strong application orientation, this is a must-have book for professionals in semiconductor industries.In order to produce defects free reticles, it is usual nowadays for repair work to be carried out on reticles. Repair techniques can be ... by placing a nitro-cellulose membrane (a pellicle) a few mm away from the reticle surface [4.23] (Fig. 4.2.29).
|Title||:||Technology of Integrated Circuits|
|Author||:||D. Widmann, H. Mader, H. Friedrich|
|Publisher||:||Springer Science & Business Media - 2013-03-09|